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Microsystem Design, by Stephen D. Senturia
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It is a real pleasure to write the Foreword for this book, both because I have known and respected its author for many years and because I expect this book’s publication will mark an important milestone in the continuing worldwide development of microsystems. By bringing together all aspects of microsystem design, it can be expected to facilitate the training of not only a new generation of engineers, but perhaps a whole new type of engineer – one capable of addressing the complex range of problems involved in reducing entire systems to the micro- and nano-domains. This book breaks down disciplinary barriers to set the stage for systems we do not even dream of today. Microsystems have a long history, dating back to the earliest days of mic- electronics. While integrated circuits developed in the early 1960s, a number of laboratories worked to use the same technology base to form integrated sensors. The idea was to reduce cost and perhaps put the sensors and circuits together on the same chip. By the late-60s, integrated MOS-photodiode arrays had been developed for visible imaging, and silicon etching was being used to create thin diaphragms that could convert pressure into an electrical signal. By 1970, selective anisotropic etching was being used for diaphragm formation, retaining a thick silicon rim to absorb package-induced stresses. Impurity- and electrochemically-based etch-stops soon emerged, and "bulk micromachining" came into its own.
- Sales Rank: #1580903 in eBooks
- Published on: 2004-12-08
- Released on: 2004-12-08
- Format: Kindle eBook
Most helpful customer reviews
3 of 3 people found the following review helpful.
Wonderful book on a complex subject
By I. Gurin
In 23 chapters, Senturia brings together a dizzying array of fields of engineering necessary to design micro-electro-mechanical systems (MEMS) and examples of MEMS products. For instance, he covers Euler beam theory, the Navier-Stokes equation, micromachining, feedback circuits, and electronic noise, and then anchors these topics with a gyroscope and a DNA amplifier, among other devices.
Senturia's approach to some chapters strikes me as a little idiosyncratic, but he does convey the principles quite well. His love for the material shines through in a way that many authors cannot manage.
Unlike books on single topics, this text cannot be used as a definitive guide to anything. Because Sentuira only has only 30 pages or so for each of the very broad topics that he covers, he doesn't cover any of them in much depth. However, the reader does get a sense of the issues that each physical domain presents. For those who need to know more, Senturia provides a short list of further reading in each chapter. I think of this book as a comprehensive starting point that can help me determine what further investigation I need.
Aesthetically, the text is somewhat lacking. The small pages are cramped compared to those of larger-format texts, and the figures are subpar.
0 of 0 people found the following review helpful.
Five Stars
By George B.
great condition, great for teaching a MEMS class
1 of 1 people found the following review helpful.
Very good reference
By Antonio Luque Estepa
This book is definitely a must-have for anyone interested in MEMS design. It's one of the classic references on microsystems that everyone should have read at least once.
The sections on mathematical modeling are especially good, and the set of detailed examples at the end are clear and illustrative.
To name some drawbacks, the chapter on fabrication is maybe a bit out of date, and more solved practical exercises are missing.
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